Robot drive with magnetic spindle bearings

ABSTRACT

A drive section for a substrate transport arm including a frame, at least one stator mounted within the frame, the stator including a first motor section and at least one stator bearing section and a coaxial spindle magnetically supported substantially without contact by the at least one stator bearing section, where each drive shaft of the coaxial spindle includes a rotor, the rotor including a second motor section and at least one rotor bearing section configured to interface with the at least one stator bearing section, wherein the first motor section is configured to interface with the second motor section to effect rotation of the spindle about a predetermined axis and the at least one stator bearing section is configured to effect at least leveling of a substrate transport arm end effector connected to the coaxial spindle through an interaction with the at least one rotor bearing section.

CROSS-REFERENCE TO RELATED APPLICATION(S)

This application is a continuation of U.S. patent application Ser. No.12/163,996 (now U.S. Pat. No. 8,283,813), filed on Jun. 27, 2008 andclaims the benefit of U.S. Provisional Patent Application No.60/946,687, filed on Jun. 27, 2007, the disclosure of which isincorporated by reference herein in its entirety.

BACKGROUND

1. Field

The present embodiments relate to robot drives and, more particularly,to robot drives with magnetic bearings.

2. Brief Description of Related Developments

Conventional robotic drives such as for example, drives for use in avacuum environment, utilize ball or roller bearings in the vacuum orother controlled environment to support drive shafts of the roboticdrive. The bearings supporting the drive shafts may employ variouslubricants to prevent metal fatigue and bearing failure. Speciallyformulate low vapor pressure greases are generally used to lubricate therobot drive bearings in the vacuum or controlled environment.

However, the use of grease to lubricate the robot drive bearings islimited because the lubrication properties of the grease decrease as thevapor pressure and temperature decrease in the robots operatingenvironment. The grease is also a possible source of contamination in avacuum or other controlled environment due to, for example, outgassing.Further, the greases used in conventional robot drives may break downand can migrate out of the bearings with the potential for contaminatingthe processing environment and can possibly cause a malfunctioning ofthe motor feedback systems of the debris from the grease migrates ontothe position feedback encoders.

It would be advantageous to have a robot drive system that employs acontactless bearing system, and hence avoiding use of grease or otherlubrication of contact surfaces. It would also be advantageous to have arobot drive system that is capable of enhanced mobility without anincrease in the number of motors powering the system.

BRIEF DESCRIPTION OF THE DRAWINGS

The foregoing aspects and other features of the disclosed embodimentsare explained in the following description, taken in connection with theaccompanying drawings, wherein:

FIG. 1 is a schematic plan view of a substrate processing apparatusincorporating features in accordance with one exemplary embodiment;

FIG. 2 shows an exemplary substrate transport incorporating features ofan exemplary embodiment;

FIG. 3 is a schematic cross-sectional illustration of a substratetransport drive section in accordance with an exemplary embodiment;

FIGS. 4A and 4B are schematic cross-sectional illustrations of asubstrate transport drive section in accordance with an exemplaryembodiment;

FIG. 5 is a schematic cross-sectional view of a portion of substratetransport drive section in accordance with an exemplary embodiment;

FIGS. 6A-6F are schematic illustrations of a portion of the substratetransport drive respectively in accordance with different exemplaryembodiments;

FIG. 6G illustrates and chart of forces applied in accordance with anexemplary embodiment;

FIG. 7 is a schematic illustration of a portion of a drive section inaccordance with an exemplary embodiment;

FIG. 7A diagrammatically illustrates forces applied in the drive sectionof FIG. 7;

FIG. 8 is a schematic illustration of a portion of a transport drivesection in accordance with an exemplary embodiment;

FIG. 9 is a schematic cross-sectional illustration of a substratetransport drive section in accordance with an exemplary embodiment;

FIG. 10 is another schematic illustration of a portion of a substratetransport drive section in accordance with an exemplary embodiment;

FIG. 11 is a schematic illustration of a portion of a substratetransport drive section in accordance with an exemplary embodiment;

FIG. 11A is yet another schematic illustration of a portion of asubstrate transport drive section in accordance with an exemplaryembodiment;

FIG. 11B is still another schematic illustration of a portion of asubstrate transport drive section in accordance with an exemplaryembodiment;

FIG. 11C is another schematic illustration of a portion of a substratetransport drive section in accordance with an exemplary embodiment;

FIGS. 11D-11F schematically illustrates portions of a substratetransport drive section in accordance with an exemplary embodiment;

FIG. 12 is a schematic illustration of a portion of an exemplary drivesection feedback system in accordance with an exemplary embodiment;

FIG. 12A is another schematic illustration of a portion of an exemplarydrive section feedback system in accordance with an exemplaryembodiment;

FIG. 13 is a schematic illustration of a portion of an exemplary drivesection feedback system in accordance with an exemplary embodiment;

FIG. 14 is a schematic illustration of a portion of the exemplary drivesection feedback system of FIG. 13;

FIGS. 14A and 14B are schematic illustrations of a portion of anexemplary drive section feedback system in accordance with an exemplaryembodiment;

FIG. 15 is a schematic illustration of the substrate transport drivesection of FIG. 11 shown in another position in accordance with anexemplary embodiment;

FIG. 16 is a schematic illustration of the substrate transport drivesection of FIG. 11 shown in still another position in accordance with anexemplary embodiment; and

FIG. 17 is a schematic illustration of a substrate transport inaccordance with an exemplary embodiment.

DETAILED DESCRIPTION OF THE EXEMPLARY EMBODIMENT(S)

FIG. 1 illustrates a perspective view of a substrate processingapparatus 100 incorporating features of the exemplary embodiments.Although the embodiments disclosed will be described with reference tothe embodiments shown in the drawings, it should be understood that theembodiments disclosed can be embodied in many alternate forms. Inaddition, any suitable size, shape or type of elements or materialscould be used.

The exemplary embodiments may increase the reliability and cleanlinessand vacuum performance of a robotic drive that may be used to, forexample, transport substrates, align substrates, or perform any othersuitable function in any suitable environment including, but not limitedto, atmospheric, vacuum or controlled environments. The robotic drivesof the exemplary embodiments may include windings configured tomagnetically support the motor spindle and to manipulate the spindlesuch that the spindle can be translated in, for example, a horizontalplane as well as be tilted with respect to, for example, a verticalplane. It is noted that the reference to the horizontal and verticalplanes is merely for convenience and that the spindle may be translatedand tilted, as will be described below, with respect to any suitablecoordinate system. Though the exemplary embodiments described in detailbelow refer particularly to transport or positioning apparatus havingarticulated arms and rotary drives, the features of the exemplaryembodiments are equally applicable to other equipment including, but notlimited to, any other suitable transport or positioning system, anyother device that rotates a substrate such as substrate aligners and anyother suitable machines with rotary or linear drives.

The substrate processing apparatus 100 shown in FIG. 1 is arepresentative substrate processing tool incorporating features of theexemplary embodiments. In this example the processing apparatus 100 isshown as having a general batch processing tool configuration. Inalternate embodiments the tool may have any desired arrangement, forexample the tool may be configured to perform single step processing ofsubstrates. In other alternate embodiments, the substrate apparatus maybe of any desired type such as sorter, stocker, metrology tool, etc. Thesubstrates 215 processed in the apparatus 100 may be any suitablesubstrates including, but not limited to, liquid crystal display panels,semiconductor wafers, such as a 200 mm, 300 mm, 450 mm wafers or anyother desired diameter substrate, any other type of substrate suitablefor processing by substrate processing apparatus 100, a blank substrate,or an article having characteristics similar to a substrate, such ascertain dimensions or a particular mass.

In this embodiment, apparatus 100 may generally have a front section105, for example forming a mini-environment and an adjoiningatmospherically isolatable section 110, which for example may beequipped to function as a vacuum chamber. In alternate embodiments, theatmosphere isolated section may hold an inert gas (e.g. N₂) or any otherisolated and/or controlled atmosphere.

In the exemplary embodiment, front section 105 may generally have, forexample one or more substrate holding cassettes 115, and a front endrobot 120. The front section 105 may also, for example, have otherstations or sections such as an aligner 162 or buffer located therein.Section 110 may have one or more processing modules 125, and a vacuumrobot arm 130. The processing modules 125 may be of any type such asmaterial deposition, etching, baking, polishing, ion implantationcleaning, etc. As may be realized the position of each module, withrespect to a desired reference frame, such as the robot reference frame,may be registered with controller 170. Also, one or more of the modulesmay process the substrate(s) 215 with the substrate in a desiredorientation, established for example using a fiducial (not shown) on thesubstrate. Desired orientation for substrate(s) in processing modulesmay also be registered in the controller 170. Vacuum section 110 mayalso have one or more intermediate chambers, referred to as load locks.The embodiment shown in FIG. 1 has two load locks, load lock A 135, andload lock B 140. Load locks A and B operate as interfaces, allowingsubstrates to pass between front section 105 and vacuum section 110without violating the integrity of any vacuum that may be present invacuum section 110. Substrate processing apparatus 100 generallyincludes a controller 170 that controls the operation of substrateprocessing apparatus 100. In one embodiment the controller may be partof a clustered control architecture as described in U.S. patentapplication Ser. No. 11/178,615, filed on Jul. 11, 2005, the disclosureof which is incorporated by reference herein in its entirety. In thisexample, controller 170 has a processor 173 and a memory 178. Inaddition to the information noted above, memory 178 may include programsincluding techniques for on-the-fly substrate eccentricity andmisalignment detection and correction. Memory 178 may further includeprocessing parameters, such as temperature and/or pressure of processingmodules, and other portions or stations of sections 105, 110 of theapparatus, temporal information of the substrate(s) 215 being processedand metric information for the substrates, and program, such asalgorithms, for applying this ephemeris data of apparatus and substratesto determine on the fly substrate eccentricity.

In the exemplary embodiment, front end robot 120, also referred to as anATM (atmospheric) robot, may include a drive section 150 and one or morearms 155. At least one arm 155 may be mounted onto drive section 150. Atleast one arm 155 may be coupled to a wrist 160, which in turn iscoupled to one or more end effector(s) 165 for holding one or moresubstrate(s) 215. End effector(s) 165 may be rotatably coupled to wrist160. ATM robot 120 may be adapted to transport substrates to anylocation within front section 105. For example, ATM robot 120 maytransport substrates among substrate holding cassettes 115, load lock A135, and load lock B 140. ATM robot 120 may also transport substrates215 to and from the aligner 162. Drive section 150 may receive commandsfrom controller 170 and, in response, direct radial, circumferential,elevational, compound, and other motions of ATM robot 120.

In the exemplary embodiment, vacuum robot arm 130 may be mounted incentral chamber 175 of section 110 (See FIG. 1). Controller 170 mayoperate to cycle openings 180, 185 and coordinate the operation ofvacuum robot arm 130 for transporting substrates among processingmodules 125, load lock A 135, and load lock B 140. Vacuum robot arm 130may include a drive section 190 and one or more end effectors 195. Inother embodiments, ATM robot 120 and vacuum robot arm 130 may be anysuitable type of transport apparatus, including but not limited to, aSCARA-type robot, an articulating arm robot, a frog leg type apparatus,or a bi-symmetric transport apparatus.

Although the exemplary embodiments will be described herein with respectto a vacuum robot, such as for example robot 800 of FIG. 2, it should berealized that the exemplary embodiments can be employed in any suitabletransport or other processing equipment (e.g. aligners, etc.) operatingin any suitable environment including, but not limited to, atmosphericenvironments, controlled atmosphere environments and/or vacuumenvironments. It should also be realized that the transportsincorporating aspects of the exemplary embodiments can have any suitableconfiguration including, but not limited to, the “frog leg”configuration of robot arm 130, the SCARA arm configuration of robot120, an articulating arm robot or a bi-symmetric transport apparatus.

An exemplary robot transport 800 is shown in FIG. 2. The transport mayinclude at least one arm having an upper arm 810, a forearm 820 and atleast one end effector 830. The end effector 830 may be rotatablycoupled to the forearm 820 and the forearm 820 may be rotatably coupledto the upper arm 810. The upper arm 810 may be rotatably coupled to, forexample the drive section 840 of the transport apparatus. For exemplarypurposes only, the drive section 840 may include a coaxial drive shaftor spindle (See FIG. 3). In this example, as shown in FIG. 3, thecoaxial shaft or spindle is shown having two drive shafts 211, 212 butin alternate embodiments the spindle may have more or less than twodrive shafts. In other alternate embodiments the drive shafts may benon-coaxial or configured in, for example, a side by side arrangement.In still other alternate embodiments the drive shafts may have anysuitable configuration. In this example, the outer shaft 211 of thecoaxial drive shaft may be suitably coupled to upper arm 810 and theinner shaft 212 may be suitably coupled to the forearm 820. In thisexample the end effector 830 may be operated in a “slaved” configurationbut in alternate embodiments an additional drive shaft may be includedin the drive unit to operate the end effector 830. The drive section 840may include two motors 208, 209, one motor for driving the outer shaftand the other motor for driving the inner shaft. The two motors 208, 209may allow movement of the arm 800 such that the arm has at least twodegrees of freedom (i.e. rotation about, for example, the Z-axis andextension in, for example the X-Y plane).

In operation, the arm 800 may be rotated about the Z-axis by energizingmotor windings such that rotational torque Rz is applied to both innerand outer shafts 211, 212 of the coaxial spindle in the same direction(i.e. both shafts rotate in the same direction). The arm may be extendedor retracted by, for example applying rotational torque Rz to the innerand outer shafts 212, 211 such that the inner and outer shafts 212, 211rotate in opposite directions. As will be described below, the positionof the arm may be fine tuned by controlling the center of rotation T1 ofthe inner and outer shafts. In accordance with an exemplary embodimentthe inner and outer shafts 212, 211 of the coaxial spindle and the arm800 may be supported by the magnetic bearings/motors as will bedescribed below.

In accordance with an exemplary embodiment, magnetic bearings located inthe drive section 840 of, for example the robotic transport 800 supportaxial and radial moment loads applied to one or more drive shaft(s) ofthe drive section for driving, for example, the arm links of the robotas will be described in greater detail below. One or more of themagnetic bearings supporting the drive shafts may be active, forexample, the magnetic bearings may be configured with radial and axialgap control that may allow controlled motion of the drive shafts (andhence the transport end effector) so that the transport has more thantwo degrees of freedom from the two motors. For example, the drivesection may provide, for exemplary purposes only, six or seven degreesof freedom in, for example, the X, Y and Z directions as well as Rx, Ry,Rz1 and Rz2 as will be described in greater detail below. In alternateembodiments the drive section may provide more or less than six or sevendegrees of freedom. These multiple degrees of freedom, for example, mayallow the active leveling and the fine tuning of a position/orientation(i.e. for substrate centering) of the arm and end effectors that areattached to the robot drive as will also be described in greater detailbelow.

In one exemplary embodiment, referring to FIG. 3, the drive section 840of the transport may include first motor stator 208S and rotor 208R(which form a first motor 208) and a second motor stator 209S and rotor209R (which form a second motor 209) and two coaxial shafts 211, 212. Asmay be realized, in alternate embodiments the coaxial shaft may havemore or less than two drive shafts. In this example the centerline ofthe stators is located along the line CL shown in FIG. 3. Although thedrive section 840 is shown as having two stators 208S, 209S it should berealized that the drive section may include any suitable number ofstators for driving more or less than two shafts. The stators 208S, 209Smay be isolated from the rotating assembly or spindle (i.e. the shafts,rotors and other motor components attached to the shafts) by, forexample, any suitable boundary 210 which may be for example, a boundaryof the housing of a processing chamber that separates the chamberatmosphere from an outside atmosphere. For example, the boundary 210 mayallow the rotors 208R, 209R to operate in a vacuum while the stators208S, 209S operate in an atmospheric environment. The boundary may beconstructed of any suitable material for use in, for example, a vacuumenvironment and from material that can be interposed within magneticfields without causing a flux short circuit or being susceptible to eddycurrents and heating from magnetic interaction. The boundary may also becoupled to suitable heat transfer devices (e.g. passive or active) tominimize temperatures in the drive section. In this exemplaryembodiment, the first motor rotor 208R may be coupled to the outer driveshaft 211 while the second motor rotor 209R may be coupled to the innerdrive shaft 212. As can be seen in FIG. 3, the outer and inner driveshafts 211, 212 are concentric or coaxial drive shafts but in alternateembodiments the drive shafts may have any suitable configurationincluding, but not limited to, side-by-side or otherwise non-concentricconfigurations.

In accordance with one exemplary embodiment, the stators 208S, 209S andtheir respective rotors 208R, 209R may form self-bearing motors/magneticspindle bearings that are configured to magnetically support theirrespective shafts 211, 212 (for example, radially and the Z-direction inthe embodiment shown) and control at least a center of rotation of theirrespective shafts 211, 212. For example, the motors 208, 209 may includeiron-core stators and rotors with permanent magnets and iron backings.In alternate embodiments the stators may include any suitableferromagnetic material for interacting with the rotors. The relativeposition between the rotors 208R, 209R and the stators 208S, 209S along,for example, the Z-direction may be maintained substantially constantdue to, for example, passive magnetic forces between the stators 208S,209S and the rotors 208R, 209R. The passive magnetic forces between thestators 208S, 209S and the rotors 208R, 209R may also stabilize the Rxand Ry orientations of the rotors 208R, 209R about, for example, the X-and Y-axis. The motor windings may be configured to apply a torque Rz1(for shaft 211), Rz2 (for shaft 212) to their respective rotors 208R,209R for rotating the shafts 211, 212 and apply radial and/or tangentialforces to control the center of rotation of the rotor in for example,the X and/or Y directions. By offsetting the X and/or Y positions of thetwo rotors 208E, 209R the spindle can be tilted as will be describedbelow.

Referring now to FIGS. 4A and 4B, another exemplary coaxial drive thatmay be employed in, for example, drive section 840 of transport robot800, is shown in accordance with an exemplary embodiment. In thisexemplary embodiment the motors 1410, 1420 of the coaxial drive 1400 arelocated radially with respect to each other rather than axially as shownin FIG. 3. For example, the first motor 1410 may be located radiallyoutward of the second motor 1420. In alternate embodiments, the motors1410, 1420 may be arranged in an axial configuration (i.e. one above theother) or in any other suitable arrangement. In this exemplaryembodiment, the first and second motors 1410, 1420 may respectivelyinclude stators 1410S, 1420S and rotors 1410R, 1420R that may besubstantially similar to the rotors and stators described above withrespect to FIG. 3. However, the rotors 1410R, 1420R in this exemplaryembodiment may be respectively located within passageways 1451, 1450formed by, for example a housing 1460. Respective rotary elementsincluding, but not limited to shafts, pulleys and robotic arm sectionsmay be attached or coupled to a respective rotor in any suitable mannerthrough, for example, the openings of the passageways 1451, 1450. In amanner substantially similar to that described above with respect toFIG. 3, the relative position between the rotors 1410R, 1420R and thestators 1410S, 1420S along, for example, the Z-direction may bemaintained substantially constant due to, for example, passive magneticforces. In alternate embodiments, active magnetic forces may provide therelative positioning of the stators and rotors. The motor windings mayalso be configured to apply a torque Rz1′ (for rotor 1410R), Rz2′ (forrotor 1420R) and radial and/or tangential forces as described above forcontrolling the position of the X-Y planar position of the rotors. Inalternate embodiments the motor may also be arranged to control as wellas the tilt the rotors.

Referring now to FIG. 5 a schematic diagram of a self bearing motor 1300that may be employed in, for example, drive section 840 of transportrobot 800 is shown illustrating exemplary magnetic forces forcontrolling the rotor 1310R. A single rotor/stator is shown in FIG. 5for exemplary purposes only and it should be realized that the motor1300 may include any suitable number of rotors/stators having anysuitable configuration including, but not limited to, the configurationdescribed above with respect to FIGS. 3 and 4 or a side by sideconfiguration. In the exemplary embodiment of FIG. 5, the stator 1310Smay be substantially similar to the stators 208S, 209S described above.The rotor 1310R may also be substantially similar to rotors 208R, 209Rdescribed above where the rotor is constructed of, for example, aferromagnetic material and may include permanent magnets 1310M and ironbackings 1310B. In alternate embodiments the rotors may be constructedof any suitable material. In other alternate embodiments the permanentmagnets may be replaced with any suitable ferromagnetic material forinteracting with the stator. The rotor magnet 1310M may include an arrayof magnets having alternating polarities mounted around a periphery ofthe rotor. The periphery of the rotor may be an internal peripheral wallor an external peripheral wall of the rotor. In alternate embodimentsthe magnet 1310M may be embedded within the rotor. In other alternateembodiments, the magnets 1310M may be located at any suitable locationon or in the rotor. The stator 1310S includes windings sets as will bedescribed in greater detail bellow which when energized drive the rotor1310R rotationally, radially and/or axially. In this exemplaryembodiment the stator 1310S may be constructed of a ferromagneticmaterial suitable for interacting with the rotor 1310R, but in alternateembodiments the stator 1310S may be constructed of any suitablematerial. The interaction between the stator 1310S and the rotor magnets1301M may produce passive forces in the direction of arrow 1350 thatpassively levitate the rotor 1310R. The levitation force may be a resultof the curved magnetic flux lines 1320, 1321 which in turn may begenerated by, for example, an offset of an edge 1360 of the rotor magnet1310M relative to the an edge of the stator 1365. In alternateembodiments the levitational forces may be generated in any suitablemanner. The passive levitational forces may generate a stableequilibrium condition along the axial and tilt directions of the rotor1310R. Radial or attractive forces may be generated as a result of themagnetic flux lines 1330 in the directions of for example, arrows 1355,1356. These attractive forces may create an unstable condition such thatthe windings may be energized to actively center and/or position therotor 1310R radially to maintain the geometric center of the rotor/axisof rotation at a desired location.

Referring now to FIGS. 6A-6G, exemplary schematic illustrations of themotor 208 are shown in three different configurations in accordance withdifferent embodiments. As may be realized, the motor 209 may besubstantially similar to motor 208. The stator 208S may include windingsthat provide forces (e.g. tangential, radial or any combination thereof)for applying torque and rotating the rotor 208R as well as to provideradial positioning forces in order to actively control the center ofrotation C of the rotor 208R. In the exemplary embodiments, the motor208 may be arranged in winding segments where each segment may be drivenas desired with any suitable number of electrical phases by, forexample, controller 170 to produce independently controllable torque,and bearing forces simultaneously. For exemplary purposes only eachwinding set may be a segment of a three phase brushless DC motor. Inalternate embodiments the winding segments may be part of any suitableAC or DC powered motor. One example of such a motor configuration isdescribed in the commonly assigned U.S. patent application Ser. No.11/769,651, entitled “REDUCED-COMPLEXITY SELF-BEARING BRUSHLESS DCMOTOR”, filed on Jun. 27, 2007, the disclosure of which is incorporatedby reference herein in its entirety.

In the exemplary embodiment shown in FIG. 6A, the stator 208S mayinclude two pairs of winding sets 208SA, 208SB, that are positioned toform any desired mechanical angle between the winding sets and may havea suitably corresponding electrical angle shift therebetween to form theself bearing motor in cooperation with the respective shaft rotor 208R.In the example shown, the rotor 208R may have a permanent magnet arrayfor example purposes only, though in alternate embodiments, the rotor208R may not have permanent magnets and be formed from, for example,ferromagnetic material or have a ferromagnetic material attached to therotor 208R in lieu of the permanent magnets. As can be seen in FIG. 6A,the winding sets 208SA, 208SB may be located about one-hundred-eightydegrees apart from each other. In alternate embodiments, the mechanicalangle may be any suitable angle and is shown in FIG. 6A as being aboutone-hundred eighty degrees for exemplary purposes only. Also in theexemplary embodiment, the electrical angle between winding sets may beformed as desired to produce the radial or tangential forces forrotating and/or positioning the spindle to which the rotor(s) 208R areattached. The windings 208SA, 208SB and the rotor 208R may be configuredand energized to produce radial and/or tangential forces so that thecenter of rotation C of the rotor 208R may be adjusted along, forexample, a linear path or any other desired path. For example, byvarying the magnitudes of the radial forces RF generated by the windings208SA, 208SB in, for example, the Y-direction the rotor 208R may bemoved along the Y-axis. Likewise, for example, by varying the tangentialforces TF produced by each of the windings 208SA, 208SB the rotor 208Rmay be displaced in, for example the X-direction as will be described ingreater detail below. It is noted that the directions of motion of therotor's center of rotation C and the direction of the forces RF, TF aredescribed herein for exemplary purposes only and the direction of motionof the rotor in the X-Y plane and the direction of the forces TF, RF maybe in any suitable directions. As may be realized the radial andtangential forces may be decoupled from one another such that the forcesmay be generated simultaneously for the positioning and/or rotation ofthe rotor 208R. As also may be realized the resultant forces produced bythe windings 208SA, 208SB may keep the rotor 208R centered in, forexample the X-Y plane. In alternate embodiments the motors describedherein may be commutated in any suitable manner such that the radialand/or tangential forces displace the rotor in any suitable direction inthe X-Y plane.

Referring now to FIG. 6B another exemplary embodiment is shown utilizingtwo winding sets 1515, 1520, where each winding set is arranged forexample as two winding subsets 1525, 1530 and 1535, 1540 respectively.The winding sets 1515, 1520 may be driven by a current amplifier 1550which may include software, hardware, or a combination of software andhardware suitable for driving the winding sets 1515, 1520. The currentamplifier 1550 may also include a processor, a commutation function anda current loop function for driving the winding sets. In one embodimentthe current amplifier 1550 may be included in any suitable controllersuch as, for example, controller 170. In alternate embodiments thecurrent amplifier 1550 may be located in any suitable location. Thecommutation function may determine current for one or more windings1525, 1530 and 1535, 1540 of each winding set 1515, 1520 according to aset of specified functions, while the current loop function may providea feedback and driving capability for maintaining the current throughthe windings as determined. The processor, commutation function, andcurrent loop function may also include circuitry for receiving feedbackfrom one or more sensors or sensor systems that provide positioninformation.

The two winding subsets 1525, 1530 and 1535, 1540 in each winding set1515, 1520 respectively of FIG. 6B are coupled electrically and shiftedwith respect to each other by about ninety electrical degrees. As aresult, when one of the two winding sets in the pair produces puretangential force the other winding set in the pair generates pure radialforce, and vice versa. In this embodiment, winding set 1515 has twosections 1530 and 1525, and winding set 1520 has two sections 1540 and1535. Exemplary relationships for the desired torque (T) and centeringforces (F_(x)) along the x-axis and (F_(y)) along the y-axis for thesegmented winding sets 1515, 1520 of the embodiment of FIG. 6Butilizing, for example, Lorentz forces are described in the U.S. patentapplication Ser. No. 11/769,651, entitled “REDUCED-COMPLEXITYSELF-BEARING BRUSHLESS DC MOTOR”, previously incorporated by reference.As may be realized, while winding subsets 1525, 1530, 1535, 1540 areshown offset by about ninety degrees it should be understood that otheroffsets that are more or less than about ninety degrees may also beutilized.

In the exemplary embodiment shown in FIG. 6C, the stator may includethree winding sets 208SC, 208SD, 208SE extending over three sectors ofthe rotor 208R. In this example, the winding sets are spaced aboutone-hundred-twenty degrees apart from each other for exemplary purposesonly. In alternate embodiments the three winding sets may have anysuitable mechanical angular relationship, that may be more or less thanabout one-hundred-twenty degrees, for stably supporting the rotor 208R(and shaft 211) with the resultant forces generated by the winding sets208SC, 208SD, 208SE. As noted above, the winding sets 208SC, 208SD,208SE may also have a suitably corresponding electrical angle shifttherebetween to form the self bearing motor in cooperation with therespective shaft rotor 208R. In the example shown, the rotor 208R may besubstantially similar to that described above with respect to FIG. 6A.As may be realized, in this exemplary embodiment the windings 208SC,208SD, 208SE may be configured and energized to produce radial,tangential and/or axial forces such that the center of rotation C of therotor 208R may be moved to any point in, for example, the X-Y plane andis not limited to linear movement along a single axis as describedabove. It is noted that the movement of the center of rotation C of therotor 208S may be limited only by the air gap G between a respective oneof the windings 208SC, 208SD, 208SE and the rotor 208R.

In another exemplary embodiment as can be seen in FIG. 6D the stator208S may include four winding sets 208SF, 208SG, 208SH, 208SI extendingover four sectors of the rotor 208R. In this example the winding sets208SF, 208SG, 208SH, 208SI are shown as being separated by, for example,an angle of about ninety-degrees for exemplary purposes only. Inalternate embodiments the four winding sets may have any suitablemechanical angular relationship, that may be more or less than aboutninety degrees, for stably supporting the rotor 208R (and shaft 211)with the resultant forces generated by the winding sets. As noted above,the winding sets 208SF, 208SG, 208SH, 208SI may also have a suitablycorresponding electrical angle shift therebetween to form the selfbearing motor in cooperation with the respective shaft rotor 208R. Inthe example shown, the rotor 208R may be substantially similar to thatdescribed above with respect to FIG. 6A. As noted above, the windings208SF, 208SG, 208SH, 208SI may be configured and energized to produceradial and/or tangential forces such that the center of rotation C ofthe rotor 208R may be moved to any point in, for example, the X-Y planeand is not limited to linear movement along a single axis where themotion of the center of rotation C of the rotor 208S may be limited onlyby the air gap G between a respective one of the windings and the rotor.

As may be realized, each of the winding segments described above inFIGS. 6A-6D may include any suitable number of circuits for generatingthe forces for manipulating the rotor 208R. For example, as can be seenin FIGS. 6E and 6F, one phase of a winding that may have, for example,two circuits 280, 281 with a zig-zag configuration is shown forexemplary purposes only. In the exemplary winding configuration shown inFIG. 6E energizing the circuits 280, 281 such that the current incircuit 280 is greater than that of circuit 281 produces a resultantforce in for example the direction of arrow 282 and vice versa. As maybe realized the circuits 280, 281 may have a cylindrical configurationas can be seen in FIG. 6F so that rotary forces 282′ may also be appliedto, for example, the rotor 208R. One example of motors includingmultiple circuit windings is described in United States PatentPublication 2005/0264119 the disclosure of which is incorporated byreference herein in its entirety.

FIG. 6G illustrates another exemplary embodiment where the tangentialforces TF1-TF4 generated by the motor winding segments are varied forcontrolling the movement of the rotor. It is noted that in the chartshown in FIG. 6G, each “+” or “−” sign represents a force with amagnitude of one unit but that the tangential forces may be applied toproduce suitable resultant differential forces for radially positioningthe rotor. The signs shown in the chart of FIG. 6G represent thedirection of the force or torque, not the value. As may be realized, byvarying the resulting differential tangential forces generated by thewinding sets the radial positioning of a respective rotor may beeffected for the fine positioning of the end effector or the tilting ofthe spindle as described herein. One example of utilizing tangentialforces for centering purposes is described in U.S. Pat. No. 6,707,200,the disclosure of which is incorporated by reference herein in itsentirety.

Although the motors 208, 209 described above with respect to FIGS. 6A-6Gare shown with two, three or four winding sets, it should be realizedthat the motors 208, 209 may have any suitable number of winding sets.It is also noted that while the motors 208, 209 are described above asbeing self-bearing motors where a set of windings may providelevitation, rotation, axial positioning and planar positioning of therotor, it should also be realized that separate or distinct magneticbearings (e.g. windings dedicated to providing some active bearingeither alone or in combination with passive permanent magnets) may beprovided with or apart from the rotors and stators of the motors formagnetically supporting the rotors and their respective shafts where theseparate magnetic bearings are utilized to control, for example, theposition of the rotors. In still other alternate embodiments, the rotorsand shafts may be controllably supported in any suitable manner such asby any suitable actuators.

Referring now to FIGS. 7, 7A and 8, the drive sections of the exemplaryembodiments, such as drive section 840 of transport robot 800, may alsobe configured to produce a desired amount of axial and tilt stiffness,and include anti-cogging elements to minimize cogging disturbances alonga number of axes, while producing a desired amount of force across theair gap G (See FIG. 3), including planar positioning forces (e.g. radialforces) for positioning the rotor as described herein. In one embodimentthe anti-cogging elements may be embodied in or incorporated as part ofthe stators of the motor. In other embodiments the anti-cogging elementsmay be separate from the stators. The anti-cogging elements may allowfor the superposition of the cogging forces caused by each anti-coggingelement component such that the overall cogging disturbance alongpropulsion, gap and axial directions is minimized. One suitable motorincluding anti-cogging elements is described in U.S. patent applicationSer. No. 12/163,993 entitled “MOTOR STATOR WITH LIFT CAPABILITY ANDREDUCED COGGING CHARACTERISTICS”, filed on Jun. 27, 2008, the disclosureof which is incorporated by reference herein in its entirety.

The exemplary stator 5100 for a rotary motor shown in FIG. 7 may beconfigured for desired passive axial and tilt stiffness while reducingor minimizing cogging effects. The stator 5100 may include two or morerecesses 5105, 5175 (and 5615, 5685) that extend inward from a firstsurface 5110 of the stator 5100. In the exemplary embodiment, therecesses may be configured to result in negligible effect on the passiveaxial and tilt stiffness of the motor. Each recess may include twotransition areas from the first surface to the recess. For example,recess 5105 may include first and second transition areas 5115, 5120,respectively, between the first surface 5110 and the recess 5105. Thetransition areas may be configured as desired, suitable examples aredescribed in U.S. Patent Application entitled “MOTOR STATOR WITH LIFTCAPABILITY AND REDUCED COGGING CHARACTERISTICS”, previously incorporatedby reference, to act on the rotor permanent magnets 5150, 5180 andgenerate anti-cogging forces upon the rotor to minimize rotor cogging.Similarly, recess 5175 may include first and second transition areas5127, 5137, respectively, between the first surface 5110 and the recess5175. Similar to the transition areas of the first recess, thetransition areas 5127, 5137 of the second recess (or anti-coggingsection of the stator) may be suitably shaped to generate respectiveanti-cogging forces acting on rotor permanent magnets 5190, 5195, thatgenerate an anti-cogging effect on the rotor. As may be realized,recesses 5615, 5685 may also have suitable transition areassubstantially similar to those described with respect to recesses 5105,5175. The transition areas of the stator recesses may operate togenerate anti-cogging forces minimizing cogging in the axial (e.g. Zdirection normal to the plane of the stator in FIG. 7) and tangentialdirections. FIG. 7A shows graphical illustrations of the forces 5410,5415 generated by respective transition areas acting on the rotor, andthe cumulative force 5420 illustrating the anti-cogging effect (e.g.axial) of the transition areas of a recess. In the exemplary embodimentshown, the recesses 5105, 5175 (shown adjacent to each other for examplepurposes, though in alternate embodiments they may not be adjacent) maybe positioned to cooperate with each other to further minimize coggingin combination, in both axial and tangential directions.

In the exemplary embodiment shown in FIG. 7, as few as two winding sets5685, 5690 may be used to drive the disclosed embodiments. Winding sets5685, 5690 may include one or more windings. It should be understoodthat the winding sets used for the aspects of the exemplary embodimentsmay include one or more windings located in one or more of the recessesand may include any type of windings suitable for use in the disclosedembodiments. The exemplary embodiments may include segmented windings,for example, winding sets divided into one or more winding subsets anddistributed in selected recesses of the stators. Each winding subset mayinclude one or more windings and may be driven to produce motor forcesaccording to the disclosed embodiments. In one or more embodiments, thewinding sets may be arranged as three phase winding sets, however, anysuitable winding set arrangement may be used.

As may be realized from FIG. 7, a rotor for operation with the stator5100 may include a plurality of permanent magnets with adjacent magnetshaving alternating polarities. In alternate embodiments the rotor may beformed of any suitable ferromagnetic material. Magnets 5150, 5180, 5190,and 5195 are shown for illustrative purposes. It should be understoodthat other magnets may be dispersed among the magnets shown.

The exemplary embodiments may also provide for a reduction of radialcogging forces, that is cogging forces parallel to the gap between thestator 100 and its respective rotor. Still referring to FIG. 7, therecesses 5105, 5615 on the surface 5110 of the stator 5100 may besuitably positioned so that forces generated on the rotor by therespective recesses combine to reduce radial cogging forces as describedfor example in U.S. Patent Application entitled “MOTOR STATOR WITH LIFTCAPABILITY AND REDUCED COGGING CHARACTERISTICS” previously incorporatedby reference.

Referring now to FIG. 8, a schematic diagram of other exemplaryanti-cogging elements 6800, 6210, 6215, 6220 is shown according to thedisclosed embodiments. The anti-cogging elements 6800, 6210, 6215, 6220may be constructed of any suitable material including, but not limitedto, ferromagnetic material. The geometry of the elements 6800, 6210,6215, 6220 is arranged such that the superposition of the cogging forcescaused by components of the elements result in a minimal overall coggingdisturbance along the propulsion and gap directions.

The components of the anti-cogging element 6800 in FIG. 8 include aninner arc-segment 6805, an outer arc-segment 6810, first and secondtransition zones 6815, 6820, a sequence of coil slots 6825, and a spanangle 6830. The inner arc-segment 6805 may be arranged to allow forinteraction with, for example, a permanent magnet rotor. In alternateembodiments the inner arc-segment 6805 may be configured to allowinteraction with any suitably configured rotor. The coil slots 6825 mayenclose a winding set, arranged for example as a three phase windingset. In alternate embodiments the winding set may have any suitablenumber of phases. The winding set may be driven in any suitable mannersuch as, for example, using a sinusoidal commutation scheme. The spanangle 6830 may be arranged such that within its arc segment itaccommodates an odd number of fractional magnet pitches. In alternateembodiments the span angle may be arranged to accommodate any suitablenumber of magnet pitches.

In the exemplary embodiment shown in FIG. 8 four anti-cogging elements6800, 6210, 6215, 6220 are utilized for exemplary purposes. It should beunderstood that any number of anti-cogging elements (e.g. more or lessthan four) may be used. In one or more embodiments the anti-coggingelements 6800, 6210, 6215, 6220 may be substantially similar to eachother and may be positioned about ninety mechanical and electricaldegrees apart. In other embodiments, the anti-cogging elements 6800,6210, 6215, 6220 may be arranged about ninety mechanical degrees apartwith corresponding coil slots 6825, 6230, 6235, 6240, respectively,aligned with an imaginary 360 degree fractional slot pitch. In someembodiments only a subset of the coil slots may be populated with coils.In alternate embodiments the anti-cogging elements may have any suitableconfiguration and/or mechanical and electrical positioning with respectto each other. Suitable examples of anti-cogging elements are describedin U.S. Patent Application entitled “MOTOR STATOR WITH LIFT CAPABILITYAND REDUCED COGGING CHARACTERISTICS,” previously incorporated byreference.

Referring now to FIG. 9, in one exemplary embodiment, the drive section,such as drive section 840 of transport robot 800 may include a Z-driveunit 220, a first rotary motor 208 and a second rotary motor 209 locatedwithin a housing 201. While the Z-drive unit 220 and the motors 208, 209are shown in the Figures as being located within the housing 201 itshould be realized that alternate embodiments the Z-drive unit 220and/or any portion of the motors 208, 209 may be located in separatehousings. In still other alternate embodiments, the drive unit may haveany suitable configuration.

The housing 201 may be constructed of any suitable material including,but not limited to, plastics, metals, ceramics, composites or anycombination thereof. The Z-drive unit 220 may include a guide rail 203,Z-drive motor 206, ball screw mechanism 207 and carriage 205. The guiderail 203 may be any suitable guide rail made of any suitable materialfor linearly guiding the carriage 205 along the Z-direction within thehousing 201. The guide rail 203 may be suitably supported at each end tohousing. In alternate embodiments the guide rail may be supported in anumber of locations along its length or may be cantilevered within thehousing. The carriage may be supported within the housing by linearbearings 204A, 204B and ball screw member 207A. Linear bearings 204A,204B and the ball screw member 207A may be attached to the carriage 205in any suitable manner such as, for example, by mechanical or chemicalfasteners, adhesives or by weldments. The linear bearings 204A, 204B mayinteract with the linear guide rail to allow the movement of thecarriage in the Z-direction. The ball screw member 207A may interactwith the ball screw 207 for moving the carriage 205 along theZ-direction when the ball screw 207 is caused to rotate by motor 206.The ball screw 207 may be supported on one end by any suitable bearing207B that allows the ball screw member to freely rotate. The other endof the ball screw may be supported and coupled to the Z-drive motor 206in any suitable manner. In alternate embodiments the ball screw 207 maybe supported within the housing and caused to rotate in any suitablemanner. The Z-drive motor may be any suitable motor including, but notlimited to, stepper motors, servo motors or any other suitable AC or DCmotors. In alternate embodiments, the drive may include any suitablelinear actuator that may be magnetically, pneumatically, hydraulicallyor electrically driven. In still other alternate embodiments the linearactuator may be driven in any suitable manner. As may be realized theconfiguration of the Z-drive unit 220 shown in FIG. 9 is exemplary andthe Z-drive unit 220 may have any suitable configuration.

Referring to FIG. 10, another exemplary embodiment of a portion of drivesection 8000, such as drive section 840 of transport robot 800 is shown.In this exemplary embodiment any suitable number of Z-drive units may beused. In one exemplary embodiment, any suitable controller such as, forexample, controller 170 may synchronize the motion of each Z-drive. Inalternate embodiments the motion of the Z-drives may be synchronized inany suitable manner. In one embodiment, stator 1310S may be supportedon, for example linear bearings 204A′, 204B′ which in turn are connectedto a pair of Z-drive units 206′, 206″. The Z-drive units 206′, 206″ maybe substantially similar to Z-drive unit 206 described above. Inalternate embodiments the Z-drive units may be any suitable drivemechanisms.

Referring now to FIG. 11, an exemplary schematic illustration of aportion of the carriage 205 is shown. It is noted that the carriage 205shown in FIG. 11 may be supported within the housing 201 (see FIG. 9) bythe Z-drive unit(s) as described above with respect to FIGS. 9 and 10.In alternate embodiments, the carriage may be supported within thehousing 201 in any suitable manner. As may be realized the drive section840 of the robotic transport, such as, for example, transport 800 may becoupled to any suitable processing equipment using the mounting flange202. To prevent particulates generated by the Z-drive unit(s), such asZ-drive unit 220, from entering the substrate processing environment aseal 400 may be provided between the carriage 205 and the mountingflange 202. For example, one end of the seal 400 may be attached to themounting flange 202 while the other end of the seal is attached to thecarriage 205. In this example, to allow for the Z-motion of the carriage205, the seal 400 is shown as a bellows seal but in alternateembodiments the seal may be any suitable seal made of any suitablematerial including, but not limited to metals, plastics, rubbers andcloths. In other alternate embodiments the seal 400 may be omitted orreplaced with any suitable barrier to isolate atmospheres across thebarrier such as, for example, a portion of the housing 201, mountingflange 202 or carriage 205.

As can be seen in FIG. 11, the carriage may include a first stator 208S,second stator 209S, encoders 410A, 410B, 410C and coaxial drive shafts211, 212. The outer drive shaft 211 may include encoder scale 430A, stopsurface 420A and first motor rotor 208R. The inner drive shaft 212 mayinclude encoder scale 430B, stop surfaces 420B and second motor rotor209R. As can be seen in FIG. 11 the drive shafts 211, 212 (which arepart of the motor spindle assembly) are shown as being longitudinallyoriented along the Z-axis for exemplary purposes. The stators 208S, 209Sand rotors 208R and 209R may form the self-bearing motors/magneticspindle bearings 208, 209 described above. For exemplary purposes only,the stator 208S is shown as including a drive portion 208D and bearingportions 208B1 and 208B2 and it should be realized that in otherexemplary embodiments, as described above, the stator may have only oneportion or section that provides rotational forces, passive levitation,and/or radial positioning forces as will be described below. Inalternate embodiments the stator 208S may include more or less than twobearing portions. The stator drive portion 208D interacts with rotordrive portion 208RD such that when the stator drive portion 208D isenergized the resulting magnetic forces cause the rotor drive portion208RD to rotate about center of rotation or axis C1 thereby rotating theouter shaft 211. In substantially the same manner, the inner shaft 212is rotatably driven about axis C2 by stator drive portion 209D and rotordrive portion 209RD. An isolation barrier 210A, 210B may be providedover each of the stators 208S, 209S such that the rotors may operate inone environment while the stators operate in another environment asdescribed above with respect to FIG. 3. It is noted that the isolationbarriers 210A, 210B may be substantially similar to barrier 210described above.

The center of rotation C1 of the outer shaft 211 may be controlled bythe bearing portions 208B1, 208B2 of the stator and bearing portions208RB1 and 208RB2 of the rotor. In the exemplary embodiments, thebearing portions may be configured to provide, for example, activeradial bearing (e.g. in Rx and Ry) and passive lift (e.g. Rz), passiveradial bearing and active lift or passive radial bearing and passivelift. In this exemplary embodiment the bearing portions 208B1, 208B2 mayboth be active bearings but in alternate embodiments one of the bearingportions may be a passive bearing portion. As may be realized, where anactive radial bearing is combined with a passive lift stator, the rotoris stabilized in pitch and role such that a second passive radialbearing may be omitted. In other alternate embodiments the active radialbearing, the rotary portion and the passive lift stator can be combinedinto a single stator-rotor arrangement. Stator bearing portion 208B1interacts with rotor bearing portion 208RB1 to, for example, control theair gap G1 while stator bearing portion 208B2 interacts with rotorbearing portion 208RB2 to, for example, control the air gap G2. It isnoted that in FIG. 11, for exemplary purposes only, one half of theshaft is shown such that the gaps G1 and G2 correspond only to the gapin, for example the X-direction for the half of the drive section shownin the Figure. It should be realized, as described above, that the gapbetween the stator and rotor may vary around the circumference of themotor 208 as the position of the center of rotation C1 changes.

Similarly the center of rotation C2 of the inner shaft 212 may becontrolled by the bearing portions 209B1, 209B2 of the stator andbearing portions 209RB1 and 209RB2 of the rotor in a mannersubstantially similar to that described above with respect to bearingportions 208B1, 208B2, 208RB1 and 208RB2. In this exemplary embodimentthe bearing portions 209B1, 209B2 may both be active bearings but inalternate embodiments one of the bearing portions may be a passivebearing portion. As described above, where an active radial bearing iscombined with a passive lift stator, the rotor is stabilized in pitchand role such that a second passive radial bearing may be omitted. Inother alternate embodiments the active radial bearing, the rotaryportion and the passive lift stator can be combined into a singlestator-rotor arrangement. Stator bearing portion 209B1 interacts withrotor bearing portion 209RB1 to, for example, control the air gap G3while stator bearing portion 209B2 interacts with rotor bearing portion209RB2 to, for example, control the air gap G4. As noted above, itshould be realized, that the gaps G3 and G4 between the stator and rotorportions may vary around the circumference of the motor 209 as theposition of the center of rotation C2 changes. The transport apparatuscontroller, such as for example control 170, or any other suitablecontroller may be configured to receive gap measurement signals fromsensors at various points around the circumference of the motors 208,209 so that the windings may be energized to position the shafts 211,212 at, for example, any suitable predetermined position and/or spatialorientation.

Referring now to FIG. 11A, another exemplary schematic illustration of aportion of the carriage 205 is shown. It is noted that the carriage 205is substantially similar to that described above with respect to FIG. 11such that like features have like reference numbers. It is noted thatthe bearing portions may provide control of the rotors in a mannersubstantially similar to that described above with respect to FIG. 11.However, in this exemplary embodiment the bearing portions 208B1 and209B2 are shown as active bearings while bearing portions 208B2′ and209B1′ are shown as passive bearing portions for exemplary purposesonly. In this exemplary embodiment, the passive bearings portions208B2′, 208B1′ may passively provide radial stabilization for the rotorsin any suitable manner. It should be realized, however, that inalternate embodiments the bearing portions may have any suitableactive/passive bearing configuration. For example, bearings 208B1 and208B2′ may be active bearings while bearings 209B1′ and 209B2 arepassive (where shaft 212 is suitably supported within shaft 211 so thatthe shafts are concentric). In other examples, bearings 208B1 and 209B2may be passive while bearings 208B2′ and 209B1′ are active. In thisexample, any suitable controller, such as controller 170, may energizethe active bearing portions 208B1, 209B2 such that the shafts 211, 212are positioned at any suitable predetermined position. In this example,the passive bearings 208B2′ and 209B1′ may act as a fulcrum for theirrespective active bearing so that the shafts 211, 212 can be spatiallyoriented, for example, by controlling the size of the gaps G1, G4.

Referring now to FIG. 11B, another exemplary schematic illustration of aportion of the carriage 205 is shown. It is noted that the carriage issubstantially similar to that described above with respect to FIG. 11such that like features have like reference numbers. However, in thisexemplary embodiment the magnetic spindle bearings 450, 451 areseparated or distinct from the rotary drives 208′, 209′. It is notedthat the bearings 450, 451 may be substantially similar to bearingportions 208B1, 208RB1, 208B2, 208RB2, 209B1, 209RB1, 209B2, 209RB2described above and are configured to provide bearing and lift controlin a manner substantially similar to that described above with respectto FIG. 11. In this exemplary embodiment the drive 208′ may includestator 208S′ mounted in the carriage 205 and rotor 208R′ attached to theshaft 211. Drive 209′ may include stator 209S′ mounted in the carriageand rotor 209R′ attached to the shaft 212. The magnetic bearing 450 mayinclude a first bearing member 450A located in the carriage and a secondbearing member 450B attached to the shaft 211. The magnetic bearing 451may include a first bearing member 451A located in the carriage and asecond bearing member 451B attached to the shaft 212. While only twomagnetic bearings 450, 451 (one on each shaft 211, 212) are shown inFIG. 11B it should be realized that in alternate embodiments anysuitable number of magnetic bearings may be associated with each of theshafts 211, 212. In one exemplary embodiment, the magnetic bearings maybe vertically segmented (i.e. the segments are offset vertically) sothat each bearing 450, 451 provides individual tilt control over arespective one of the shafts 211, 212 along the Rx, Ry axes. In otherexemplary embodiments, the shafts may be constrained with respect toeach other in any suitable manner such as by, for example, suitablebearings provided between the shafts 211, 212 so that the shafts 211,212 remain concentric while bearings 450, 451 stabilize or control theradial position and tilt (e.g. Rx, Ry) of the coaxial shafts 211, 212 asa unit.

Referring now to FIG. 11C, an exemplary schematic illustration of aportion of the carriage 205 is shown. It is noted that the carriage issubstantially similar to that described above with respect to FIG. 11such that like features have like reference numbers. However, in thisexemplary embodiment the magnetic spindle bearings/stators 208″, 209″are shown as having one portion or section configured to providerotational forces, levitation, axial forces and/or planar X-Y (i.e.radial) positioning forces (e.g. the stator and passive bearings areintegrated with each other in a unitary drive member). The magneticspindle bearings/stators may be configured to provide bearing and liftcontrol in a manner substantially similar to that described above withrespect to FIG. 11. In one exemplary embodiment, the magnetic spindlebearings/stators 208″, 209″ may be configured as sets of interposedwindings for generating the different driving forces for operating thedrive section. In alternate embodiments the windings may benon-interposed windings that may be commutated in such a way as togenerate the driving forces described herein. In this exemplaryembodiment the interaction between the stators 208S″, 209S″ and theirrespective rotors 208R″, 209R″ may respectively produce the magneticflux fields 1330, 1320 and 1330′, 1320′ and corresponding passive andattractive forces in a manner substantially similar to that describedabove with respect to FIG. 5. The motor 208″ may be configured asdescribed above to control the gap G5 while the motor 209″ may beconfigured as described above to control the gap G6. As described above,by varying the gaps G5 and G6 the spindle 600 may be tilted and/orpositionally located within, for example the X-Y plane for the finepositioning of, for example, the robot arm coupled to the spindle andthus the substrate carried on the robot arm. In one exemplaryembodiment, the magnetic bearings/stators may be vertically segmented(i.e. the segments are offset vertically) so that each bearing 208″,209″ provides individual tilt control over a respective one of theshafts 211, 212 along the Rx, Ry axes. In other exemplary embodiments,the shafts may be constrained with respect to each other in any suitablemanner such as by, for example, suitable bearings provided between theshafts 211, 212 so that the shafts 211, 212 remain concentric whilebearings 208″, 209″ stabilize or control the radial position and tilt(e.g. Rx, Ry) of the coaxial shafts 211, 212 as a unit.

Referring now to FIGS. 11D-11F another exemplary motor configuration isshown in accordance with an exemplary embodiment. For example, themotors 1000, 1010 and their controller 1050, which may be similar tocontroller 170, may be configured so that an electrical angle is used todrive a common set of commutation functions to produce three dimensionalforces including propulsion forces about an axis of rotation of thedrive shafts 211, 212, propulsion forces in the z-direction and aguidance forces in the X and/or Y directions for tilting, rotating andpositioning the spindle 1070. In other words, by adjusting theelectrical angle with the electrical angle offset, at least one, two,and three dimensional forces may be produced in the motor using a commonset of commutation equations. Examples of such a drive configuration isdescribed in commonly assigned U.S. patent application Ser. No.11/769,688, filed on Jun. 27, 2007 and entitled “COMMUTATION OF ANELECTROMAGNETIC PROPULSION AND GUIDANCE SYSTEM”, the disclosure of whichis incorporated by reference herein in its entirety.

In this exemplary embodiment the two motors 1000, 1010 of drive unit1099 provide, for example, at least seven degrees of freedom. Forexample, where the shafts 211, 212 are held coaxial with respect to oneanother via, for example, suitable bearings between the shafts 211, 212the two motors may provide seven degrees of freedom. In another example,where the shafts 211, 212 are not constrained with respect to oneanother (i.e. the shafts can move relative to each other in all axes)the degrees of freedom provided by the two motors may be, for example,twelve degrees of freedom. The drive unit 1099 may be substantiallysimilar to the drive unit described above with respect to FIG. 11 unlessotherwise noted. FIG. 11D shows a drive unit where each of the motors1000, 1010 are configured to provide forces in four dimensions (i.e. X,Y, Z and rotation of the respective shaft) for the operation of thetransport. As may be realized, the motors may also produce moments alongthe Rx, Ry and Rz axes that results from forces produced by differentsegments of the stator windings. For example, in one exemplaryembodiment, the windings of the motors may be vertically segmented in amanner substantially similar to that described above. A propulsionsystem for the shafts 211, 212 is shown that provides propulsion (i.e.rotation Rz1 for the outer shaft 211 and rotation Rz2 for the innershaft 212) about the Z-axis using, for example, Lorentz forces, liftalong the z-axis using, for example, Lorentz forces, and gap controlalong the X and Y-axes (i.e. planar motion in the X-Y plane as well asrotation Rx and Ry about the X and Y axes) using, for example, Lorentzand Maxwell forces when, for example, the shafts are held concentricwith one another as described above. Where the shafts are notconstrained with respect to each other the tilting (Rx, Ry) moments maybe produced independently for each of the shafts 211, 212 by forexample, different lift forces along the Rz axis produced by for examplevertically offset winding segments along the circumference of eachstator. In alternate embodiments the propulsion system may propel theshafts 211, 212 along the Rx, Ry, Rz1, Rz2, Z, X, Y axes/planes in anysuitable manner.

In the exemplary embodiment shown in FIG. 11D the motors 1000, 1010 mayrespectively include winding sets 1000A, 1000B and 1010A, 1010Bpositioned in, for example, the carriage 205. Each of the winding sets1000A, 1000B, 1010A, 1010B may include individual windings 1065 as canbe seen with respect to winding 1000A in FIG. 11F. In alternateembodiments, the winding sets and/or the individual windings may haveany suitable configuration such as, for example, the zig-zag ortrapezoidal winding configurations described in United States PatentPublication 2005/0264119 previously incorporated by reference. Thewinding sets 1000A, 1000B and 1010A, 1010B may be driven by amplifier1051, which may be part of controller 1050. In alternate embodiments theamplifier 1051 may be separate from the controller 1050. Amplifier 1051may be any suitable amplifier such as, for example, a multi-channelamplifier capable of driving each of the individual windings 1065 ofwinding sets 1000A, 1000B, 1010A, 1010B separately or in groups. Windingsets 1000A and 1010A may have the same orientation and may be orientedfor example, about ninety degrees from winding sets 1000B and 1010Brespectively. In alternate embodiments the winding sets may have anysuitable mechanical angular relationship, that may be more or less thanabout ninety degrees, for stably supporting the rotor (and shaft) withthe resultant forces generated by the winding sets. As noted above, thewinding sets may also have a suitably corresponding electrical angleshift therebetween to form the self bearing motor in cooperation withthe respective shaft rotor.

In the exemplary embodiment shown in FIG. 11D each of the shafts 211,212 of the drive unit 1099 respectively includes magnet rotors 1000P,1010P. In the example shown, the magnetic rotors 1000P, 1010P may havepermanent magnet arrays for example purposes only, though in alternateembodiments, the rotors 1000P, 1010P may not have permanent magnets andmay be formed from, for example, ferromagnetic material. Each of therotors 1000P, 1010P may be arranged as an array of magnets and mayextend around the circumference of their respective shafts 211, 212. Inone exemplary embodiment, as can be seen in FIG. 11E, the array ofmagnets of rotors 1000P, 1010P may be arranged with alternating northpoles 1101 and south poles 1102 facing the winding sets 1000A, 1000B,1010A, 1010B. In other exemplary embodiments the rotors 1000P, 1010P mayhave any suitable configuration including, but not limited to, thosedescribed in U.S. patent application Ser. No. 11/769,688, filed on Jun.27, 2007 and entitled “COMMUTATION OF AN ELECTROMAGNETIC PROPULSION ANDGUIDANCE SYSTEM”, previously incorporated by reference. In alternateembodiments the winding sets and magnet platens may have any suitableconfiguration for driving the spindle assembly and shafts as describedherein.

Any suitable sensor systems such as, for example, those described belowwith respect to FIGS. 12-15B may be provided for sensing the location,for example, the x, y, z, Rx, Ry and Rz coordinates of the individualshafts 211, 212 and/or the spindle assembly 1070. In alternateembodiments the relative motion between the rotors and stators mayproduce back electro-motive force that can provide positionalinformation in any direction relative to the magnet array via, forexample the sum of the voltages in a phase and/or in the directionnormal to the magnet array via, for example different circuit voltageswhere each of the winding sets includes multiple circuits. In otheralternate embodiments other suitable sensor systems may be utilized.

In one exemplary embodiment, the planar movement of the spindle assembly1070 in the X and/or Y directions, the tilt Rx, Ry of the spindleassembly 1070, the rotation Rz1, Rz2 of each of the shafts 211, 212 andthe movement of the spindle assembly 1070 along the Z-axis as describedabove may be controlled by adjusting the electrical angle with anelectrical angle offset using a common set of commutation equations. Inalternate embodiments the movement of the drive unit components may becontrolled in any suitable manner. It is noted that in this exemplaryembodiment the two motors 1000, 1010 provide, for example, seven degreesof freedom for the drive system 1099. As may be realized an the driveunit 1099 may also include a Z-drive unit as described above withrespect to FIG. 9.

Referring again to FIG. 11 and also to FIG. 12, the rotational positionof the outer and inner shafts 211, 212 may be tracked through, forexample, any suitable encoders, such as encoders 410A, 410B and theirrespective encoder scales 430A, 430B. In alternate embodiments therelative motion between the rotors and stators may produce backelectro-motive force that can provide positional information asdescribed above. In this exemplary embodiment, the encoders 410A, 410Bare configured as optical encoders having an emitter 412 and a read head411. In alternate embodiments the encoders may be configured as anysuitable encoder including, but not limited to, optical, reflective,capacitive, magnetic and inductive encoders. The encoder scales 430A,430B may be any suitable scales configured to allow the encoder to tracka rotational position of their respective shafts. In one exemplaryembodiment, as can be seen in FIG. 11, the encoder 410A may be mountedon the carriage 205 and arranged to interact with scale 430A, which maybe mounted on the outer shaft 211. Encoder 410B may be mounted on thecarriage 205 and arranged to interact with scale 430B, which may bemounted on the inner shaft 212. In alternate embodiments the scales maybe located on the carriage while the encoders are located on arespective one of the drive shafts. In other alternate embodiments theencoders and encoder scales may have any suitable configuration. Thepositional signals output by the encoders 410A, 410B may be utilized by,for example, controller 170 to provide feedback as to the position of anarm link coupled to a respective one of the shafts and/or for motorcommutation.

As can best be seen in FIG. 12, in one exemplary embodiment, anexemplary encoder emitter 412 and read head 411 may be coupled to anencoder frame or module 500 that may be inserted into the carriage. Theencoder frame may be constructed of any suitable material includingmaterials configured for use in a vacuum environment. The encoder frame500 may be configured such that the emitter 412 and read head 411 may bemovable in the direction of arrows A and B to allow for adjustment ofthe encoder with respect to the encoder scale 430A. Any suitable seals510E, 510C may be provided between the emitter 412 and read head 411 andthe encoder frame 500 to prevent any particulates from entering thesubstrate processing environment. Suitable seals 510A, 510B may also beprovided between the encoder frame 500 and the carriage 205 to preventparticulates from entering the substrate processing environment. It isnoted that encoder 410B may be substantially similar to encoder 410A. Inalternate embodiments the encoder frame 500 may be configured such thatthe encoder emitter and read head are kept in an environment separatefrom the substrate processing environment and utilized through opticalview ports to reduce the amount of materials that can outgas into, forexample, a vacuum processing environment. In other alternateembodiments, any suitable feedback devices could be utilized including,but not limited to, Hall effect sensors, inductive sensors andresolvers.

Referring now to FIG. 12A, another exemplary encoder configuration isshown in accordance with another exemplary embodiment. In this exemplaryembodiment the carriage 205′ may have recesses or openings 530A, 530Bfor accepting sensor inserts or modules 550A, 550B. The recesses 530A,530B may have view ports 560A, 560B that allow the sensor components411′, 412′ to sense the encoder scale 430A. The modules 550A, 550B mayhave any suitable shape and or configuration. For example the modules550A, 550B may be configured such that upon insertion of the modules550A, 550B into their respective recesses 530A, 530B the sensors 411′,412′ are aligned with each other and the encoder scale. In alternateembodiments the modules may be adjustable within the recesses so thatthe sensors may be aligned with a respective encoder scale. As may berealized, while the modules 550A, 550B are shown in FIG. 12A as separatemodules, in alternate embodiments the modules 550A, 550B may have aunitary construction (e.g. one piece). In this exemplary embodiment themodule 550A may include an encoder read head 411′ positioned in themodule 550A such that the read head 411′ is aligned with the view port560A when the module 550A is inserted into the carriage 205′. In thisexemplary embodiment the read head 411′ forms a seal 570A between themodule 550A and the carriage 205′ to prevent any leakage of atmosphereor the passage of contaminates into or out of the substrate processingarea. In alternate embodiments, the seal may be formed between the readhead and carriage in any suitable manner. In other alternateembodiments, a “window” or optically clear material that is separatefrom the read head 411′ may cover and seal the view port 560A. Module550B may include an encoder emitter 412′ positioned in the module 550Bsuch that the emitter 412′ is aligned with the view port 560B when themodule 550B is inserted into the carriage 205′. In this exemplaryembodiment the emitter 412′ forms a seal 570B between the module 550Aand the carriage 205′ to prevent any leakage of atmosphere into or outof the substrate processing area. In alternate embodiments, the seal maybe formed between the read head and carriage in any suitable manner. Inother alternate embodiments, a “window” or optically clear material thatis separate from the emitter 412′ may cover and seal the view port 560B.As may be realized the modules 550A, 550B may be suitably connected to acontroller, such as controller 170, for providing feedback regardingshaft orientation, planar position and rotational position. It is notedthat the configuration of the exemplary modules 550A, 550 b shown in thedrawings is for example purposes only and that the modules 550A, 550Bmay have any suitable configuration and/or include any suitable types ofsensors including, but not limited to, inductive and capacitive sensors.

The encoders 410A, 410B, 550A, 550B may also be configured to measure,for example, one or more of the gaps G1-G4 between the stators androtors of the motors 208, 209. For example, the scale 430A may beconfigured to allow the encoders to measure the air gaps. In alternateembodiments the encoders may be configured to measure the air gaps inany suitable manner. In other alternate embodiments additional encodersor other feedback devices may be positioned in, for example, proximityof the shafts 211, 212 for measuring one or more of the gaps G1-G4.

Referring now to FIG. 13, another exemplary sensor configuration 1100 isshown for detecting, for example, the rotational position, axialposition, X-Y planar position and/or gap with respect to, for example,drive shaft 211. In this exemplary embodiment, the sensor configuration1100 is configured as a non-invasive sensor such that no optical viewports or feed-throughs are needed in, for example, the barrier 210 thatisolates, for example, the vacuum environment from the atmosphericenvironment.

The sensor configuration 1100 of FIG. 13 may utilize magnetic circuitprinciples for determining, for example the distance from aferromagnetic target 1110 (that may be affixed to e.g. the rotor ordrive shaft) to the transducer or read head frame. The ferromagnetictarget may have any suitable contour (e.g. curved for rotary drive orflat for linear drives) and have any suitable profile(s) embedded in itas will be described in greater detail below. In this exemplaryembodiment, the transducer or read head 1120 includes, for example, aferromagnetic element 1122, a permanent magnet 1123, magnetic sensors1124A-1124D and a mounting substrate 1125. The permanent magnet 1123 mayhave any suitable shape such as for example the cylindrical shape shownin FIG. 13. The poles of the permanent magnet 1123 may be oriented suchthat they are parallel with the mounting substrate however, in alternateembodiments the poles may be oriented in any suitable manner. Themagnetic sensors 1124A-1124D may be any suitable magnetic sensorsincluding, but not limited to, Hall effect sensors, reed switches andmagnetoresistors.

The ferromagnetic element 1122 may have any suitable shape such as, forexample, the cup shape shown in FIG. 13. The ferromagnetic element 1122may be positioned relative to the permanent magnet 1123 such that thecupped shape is concentric with the permanent magnet 1123. In alternateembodiments the ferromagnetic element 1122 may have any suitablepositional relationship with the permanent magnet 1123. The permanentmagnet 1123 may be coupled to a center of the ferromagnetic element 1122in any suitable manner such as for example, through magnetic attraction,mechanical fasteners and/or adhesives. The configuration of thepermanent magnet 1123 and the ferromagnetic element may be such that amagnetic circuit is created where a magnetic flux is formed with auniform density along a certain path. In the exemplary embodiment shownin FIG. 13, the magnetic flux density may be uniform along the circle1127.

In this example, the four magnetic sensors 1124A-1124D are placed alongthe uniform magnetic flux path indicated by circle 1127 such that theiroutputs are substantially the same. It should be realized that inalternate embodiments any suitable number of magnetic sensors may beplaced along the uniform magnetic flux path. The outputs of the magneticsensors may be routed to any suitable conditioning circuit 1126 forprocessing the sensor output signals to optimize the quality of theoutput signal 1128. As may be realized increasing the number of magneticsensors in the read head 1120 may increase the noise immunity of theread head 1120. In alternate embodiments the magnetic sensors may bearranged in pairs with alternating orientations relative to the fluxdensity lines. The pairs of sensors can each provide a differentialoutput that may improve noise immunity on the signal routing from theread head location to any suitable device that will read the signal. Inother alternate embodiments the magnetic sensors may be arranged in anysuitable manner.

In operation, placing the ferromagnetic target 1110 in front of the readhead 1120 may alter the magnetic flux density vector sensed by themagnetic sensors 1124A-1124D thereby modifying the output signal 1128 ofthe magnetic sensors 1124A-1124D. As may be realized the distance or gap1130 between the ferromagnetic target 1110 and the read head 1120influences the value of the output signal 1128. As may also be realizedthe shape of the permanent magnet 1123 and ferromagnetic element 1122may be optimized to maximize the range of operation (e.g. the distance1130) of the read head 1120.

The sensor configuration of the exemplary embodiment of FIG. 13 may becapable of sensing the gap between, for example, the rotor 1200R andstator 1200S through the barrier 210 in a non-invasive manner as can beseen in FIG. 14. FIG. 14 shows a schematic illustration of a portion ofthe sensor configuration described above with respect to FIG. 13. Inthis exemplary embodiment, the ferromagnetic target may be the rotorbacking 1210, but in alternate embodiments the target may be anysuitable ferromagnetic target. The read head 1120 may interact with therotor backing 1210 such that the magnetic flux lines pass from the readhead 1120 through the barrier 210 to the rotor backing 1210 and back tothe sensor 1124. The sensor signal may be sent to, for example anysuitable electronics, such as controller 170 for reading the signal andthe determination of the gap 1130 size.

Referring now to FIGS. 14A and 14B, another exemplary sensor feedbacksystem is illustrated in accordance with an exemplary embodiment. As canbe seen in FIG. 14A, the sensor system includes a ferromagnetic target1340 and three sensors 1350-1370. In alternate embodiments the feedbacksystem may include more or less than three sensors. In this exemplaryembodiment, the ferromagnetic target may be the rotor backing, but inalternate embodiments the target may be any suitable ferromagnetictarget. As can be seen best in FIG. 14B the ferromagnetic target 1340 inthis example is configured as a rotor 1300R that may be utilized in, forexample the motor described above with respect to FIGS. 4A and 4B forexemplary purposes only. The rotor backing 1340 may have severalprofiles embedded in a surface 1390 of the rotor backing 1340. In thisexample, an absolute track profile 1330 and an incremental track profile1310 are embedded or otherwise formed in the backing 1340. The absoluteand incremental track profiles 1330, 1310 may include any suitableprofile (e.g. lands and grooves, recesses, etc.) for suitably tracking aposition of the rotor 1300R. In alternate embodiments the rotor 1300Rmay have any suitable configuration of profiles. In alternateembodiments the profiles may be provided separately from the rotor 1300Rand located at any suitable location within the drive section. It isalso noted that while the ferromagnetic target is described as being therotor backing, it should be realized that the ferromagnetic target maybe separate from the rotor. For example, the ferromagnetic target may beattached to any suitable position on, for example, a drive shaft of theexemplary embodiments described herein.

The sensors 1350-1370 may be substantially similar to each other and toread head 1120 described above. In alternate embodiments the sensors1350-1370 may be any suitable sensors. In this exemplary embodiment, thesensors 1350-1370 may be positioned relative to the rotor 1300R suchthat each sensor provides a different sensor reading. For example, thesensor 1350 may be aligned with the absolute track profile 1330 to forman absolute position sensor. Sensor 1360 may be aligned for interfacingwith the non-profiled surface 1320 of the rotor backing 1340 to form agap sensor. Sensor 1370 may be aligned with the incremental trackprofile 1310 to form an incremental position sensor. In alternateembodiments the sensors may be configured along with a respectivemagnetic target to provide any suitable positioning information. Othersuitable feedback systems for use with the drive sections of theexemplary embodiments is described in U.S. patent application Ser. No.12/163,984 entitled “POSITION FEEDBACK FOR SELF BEARING MOTOR”, filed onJun. 27, 2008, the disclosure of which is incorporated by referenceherein in its entirety.

As may be realized, the carriage 205 may also include any suitablesensor, such as, for example, sensor 410C shown in FIG. 11 for sensingthe position of the carriage 205 along the Z-direction. The sensor 410Cmay be substantially similar to sensors 410A, 410B. In alternateembodiments the sensor 410C may be any suitable sensor having anysuitable configuration, including, but not limited to, those sensorsdescribed herein.

Referring back to FIG. 11, as may be realized the motors/magneticspindle bearings 208, 209 may not support the shafts 211, 212 when thewindings of the motors 208, 209 are not energized, such as when thetransport apparatus (e.g. transport 800) is powered down or otherwiseloses power. The carriage 205 and/or shafts 211, 212 may be configuredsuch that the shafts 211, 212 are supported in any suitable manner whenthe windings are not energized. In one exemplary embodiment as can beseen in FIG. 11, the carriage 205 may include a support surface 421A andthe outer shaft 211 may include a support member 421B that is coupled tothe shaft in any suitable manner. In alternate embodiments the supportmember 421B may be of unitary construction with the shaft 211. As thewindings 208B1, 208B2 are de-energized the outer shaft 211 may belowered so that the support member 412B rests on support surface 421A.As may be realized the shape and/or configuration of the support surface421A and support member 421B may be any suitable shape and/orconfiguration for stably supporting the shaft 211 when the windings208B1, 208B2 are not energized.

The shaft 211 may also have a support surface 420A and the inner shaft212 may have a support member 420B. In this example the, support member420B of the inner shaft 212 is shown as being of unitary constructionwith the shaft 212 but in alternate embodiments the support member 420Bmay be a separate member coupled to the shaft 212 in any suitablemanner. As the windings 209B1, 209B2 are de-energized the inner shaftmay be lowered so that the support member 420B of the inner shaftinteracts with the support surface 420A of the outer shaft 211 tosupport the inner shaft 211. The shape and/or configuration of thesupport surface 420A and support member 420B may be any suitable shapeand/or configuration for stably supporting the shaft 212 when thewindings 209B1, 209B2 are not energized.

It is noted that the support surfaces and support members shown in FIG.11 are for exemplary purposes only and that the shafts 211, 212 may besupported in any suitable manner when the transport is in a powered downstate. For example, in alternate embodiments the shafts may be supportedby any suitable supports including, but not limited to, ball bearings,roller bearings and/or suitable bushings. In other alternateembodiments, permanent magnets may be located in the carriage inproximity to the outer and inner shafts 211, 212. The permanent magnetsof the carriage may interact with respective permanent magnets locatedon the shafts 211, 212 such that the shafts 211, 212 are supported whenthe transport is powered down. It is noted that where permanent magnetsare utilized to support the shafts 211, 212 the windings 208B1, 208B2,209B1, 209B2 may have sufficient power to overcome the magnetic forcesproduced by the permanent magnets so that the center of rotation of theshafts can be positioned as described herein.

Referring now to FIGS. 15-17, an exemplary operation of the exemplaryembodiments will be described. As described above the shafts 211, 212may be coupled in any suitable manner to arm links of the transportapparatus.

As can be seen best in FIG. 15 the controller (e.g. controller 170) maybe configured to energize the motor windings of stators 208S and 209S toproduce radial and/or tangential forces so that the rotors 208R, 209Rare skewed along the Z-axis by an angle α which causes the longitudinalcenterline C1, C2 of shafts 211, 212 to be tilted with respect to, forexample, the centerline Z1 of the carriage 205 and/or stators 208S, 209S(i.e. the spindle 600 is rotated about the X and/or Y axes) as shown inFIG. 15. As can be seen in FIG. 15, the air gaps G1-G4 increase towardsthe bottom 205B of the carriage 205 for exemplary purposes only and itshould be realized that the air gaps may increase or decrease dependingon the direction of tilt with respect to the X-Y plane. The controllermay be configured to energize the windings of the stators 208S, 209S sothat the air gaps G1-G4 and the tilt angle α are maintained as the armis extended or retracted. In alternate embodiments the windings may beenergized to tilt the spindle 600 after the arm is extended orretracted. In still other alternate embodiments the spindle 600 may betilted at any point in time during the operation of the arm. As may berealized the tilt may be in any suitable direction such as a tilt Rx inthe X-direction, a tilt Ry in the Y-direction or a tilt in both the Xand Y directions. The angle of tilt α may be limited only by, forexample, the size of the air gap G1-G4 between the stators 208S, 209Sand the rotors 208R, 209R.

As can be seen in FIG. 16, the windings may also be energized so thatthe spindle 600 is translated in the X-Y plane such that the centerlineof the shafts 211, 212 (i.e. spindle 600) remains parallel with theZ-axis. In the example shown in FIG. 16, the longitudinal centerline orcenter of rotation of the shafts 211, 212 is moved by a distance D awayfrom, for example, the centerline Z1 of the carriage 205 or any othersuitable location within the drive system. The air gaps G1-G4 shown inFIG. 16 are illustrated as being substantially equal but as noted above,it should be realized the air gaps will be different depending on whichpoint on the circumference of the stators/rotors the air gap ismeasured. It is noted that the distance D traveled by the spindle in theX-Y plane (e.g. the X-Y translation) may only be limited by the size ofthe air gaps G1-G4.

The X-Y translation and/or the tilting of the spindle assembly 600 andthe arm 800 coupled thereto may be utilized to fine tune the position ofthe arm 800 so that a substrate S located on the end effector 830 issuitably spatially positioned in or on, for example, a substrateprocessing chamber, a load lock, an aligner, a substrate cassette or anyother suitable equipment used in processing and/or storing thesubstrate. For example, referring to FIG. 17, a schematic illustrationof a transport 900 and a substrate station 910 are shown. The transportincludes a spindle assembly 600 and an arm 800 as described above. Thesubstrate station 910 may be any suitable station for supporting,storing and/or processing a substrate such as, for example, a substratealigner. In this example, the transport may be, for example, mounted sothat the centerline of the spindle 600′ (e.g. when the air gap betweenthe spindle and the stators is substantially uniform) is notperpendicular with the substrate seating plane 911 of the substratestation 910. As such, a substrate S located on the end effector 830 ofthe arm 800 may not be parallel with the substrate seating plane 911.The windings of the motors of the transport 900 may be energized asdescribed above to tilt the spindle at an angle of α′ in the X-Y planeso that the substrate S is substantially parallel with the substrateseating plane 911 when the substrate is placed on the substrate station910. As may be realized the spindle assembly 600 may also be translatedin the X and/or Y directions to fine tune the orientation and/orposition of the end effector and the substrate S carried on the endeffector with respect to the substrate station 910. As may also berealized the translation of the substrate in the X and/or Y directionmay also be effected through a tilting of the spindle in the directionthe substrate is to be translated and moving the substrate in forexample, the Z-direction to compensate for the tilt of the spindle whenplacing the substrate. In fine tuning the orientation and/or position ofthe end effector, the end effector may be leveled or made substantiallyparallel with a substrate seating surface or plane and/or the positionof the end effector may be adjusted in, for example the X-Y planewithout rotating, extending or retracting the robot arm. The fine tuningof the end effector position through controlling the centerline of thespindle assembly 600 may also be utilized to compensate for sag in thearm 800 or for any other suitable purpose.

It is also noted that the substrate station 910 shown in FIG. 17 mayincorporate a drive system substantially similar to that described abovewith respect to FIGS. 15-17 such that the substrate seating surfaceattached to, for example a drive shaft of an aligner motor may be tiltedand/or translated as described herein.

The drive sections of the exemplary embodiments as described hereininclude, for example, seven degrees of freedom which include X, Y, Z,Rx, Ry, Rz1 and Rz2. In one exemplary embodiment, Rz1 and Rz2 areassociated with the rotation of the shafts 211 and 212 respectively. X,Y, Rx and Ry are associated with the location and/or tilt of the spindle600 (i.e. offsetting the position of the rotors 208R, 209R). Z isassociated with the movement of the carriage 205 (and the arm 800) alongthe Z-direction. It is noted that in one embodiment there are sixdegrees of freedom provided by the two motors 208, 209 while the seventhdegree of freedom is provided by the Z-drive unit 220. In otherembodiments such as that shown in FIGS. 11D-11F seven degrees of freedommay be provided by the two motors while an eighth degree of freedom isprovided by a Z-drive unit.

As noted above, the number of degrees of freedom of the exemplary drivesis not limited to seven. In alternate embodiments drive sections inaccordance with the exemplary embodiments may have more or less thanseven degrees of freedom. For example, the transport apparatus may bemounted on a movable carriage that allows the entire transport to betranslated in a one, two or three dimensional direction. In otherexamples, the drive system may have more or less than two drive shafts.

These multiple degrees of freedom in the drive unit may allow for thefine leveling and positioning of substrates while compensating for anymisalignment between the transport and substrate station and/or anydeflection from cantilever effects of the substrate transport. Themagnetic spindle bearings provided by the drive section of the exemplaryembodiments may also provide a lubrication free rotary spindle therebyreducing the possibility that any particulates are introduced into thesubstrate processing area. The magnetic spindle bearings of theexemplary embodiments also reduce possible outgassing that may be causedby, for example, grease or other lubricants that may be used tolubricate the spindle of the drive section.

As may be realized, the exemplary embodiments described herein may beutilized separately or combined in any suitable manner for driving amotor of, for example a robotic transport or other equipment including,but not limited to, substrate aligners. As also may be realized,although the exemplary embodiments are described herein with respect torotary motors, the exemplary embodiments are equally applicable fordriving linear motor systems.

It should be understood that the foregoing description is onlyillustrative of the embodiments. Various alternatives and modificationscan be devised by those skilled in the art without departing from theembodiments. Accordingly, the present embodiments are intended toembrace all such alternatives, modifications and variances that fallwithin the scope of the appended claims.

What is claimed is:
 1. A substrate transport for transporting substratesto and from at least one substrate seating surface, the substratetransport comprising: a substrate transport arm; a drive section locatedwithin a frame and connected to the substrate transport arm through acoaxial spindle, the drive section being configured to operate thesubstrate transport arm through a spindle rotation or spindledisplacement; and at least one substrate support coupled to thesubstrate transport arm; wherein the drive section has a solid stateactuator that includes at least one stator attached to the frame thatinterfaces with and is configured to magnetically support the coaxialspindle substantially without contact and to effect a substantiallysolid state change, free of stator movement, in an orientation of apredetermined axis of rotation of the coaxial spindle relative to the atleast one stator of the solid state actuator to spatially orient the atleast one substrate support with respect to one of the at least onesubstrate seating surface.
 2. The substrate transport of claim 1,further comprising a linear drive coupled to the drive section andconfigured to linearly translate the drive section within the frame. 3.The substrate transport of claim 1, wherein the drive section furthercomprises at least one rotor attached to the coaxial spindle, the atleast one stator being configured to change at least an angularorientation of the predetermined axis of rotation of the coaxial spindlewith respect to a centerline of the at least one stator through aninteraction with the at least one rotor.
 4. The substrate transport ofclaim 3, wherein the at least one stator and the at least one rotor areisolated from one another where the at least one stator operates in afirst environment and the at least one rotor operates in a secondenvironment.
 5. The substrate transport of claim 1, further comprising adrive section feedback system comprising at least one sensor locatedwithin the drive section and configured to measure a planar position ofa spindle centerline and an angular orientation of the spindlecenterline with respect to a centerline of at least one stator of thedrive section.
 6. The substrate transport of claim 1, wherein thecoaxial spindle comprises at least two drive shafts each having a rotorconfigured to interface with a respective stator of the drive sectionwhere each of the respective stators interacts with a respective one ofthe rotors to effect a change in spatial orientation of a predeterminedaxis of rotation of the spindle.
 7. The substrate transport of claim 6,wherein the respective stators are configured to interact with arespective rotor of the at least two drive shafts to axially offset thepredetermined axis of rotation of the spindle from a centerline of therespective stators.
 8. The substrate transport of claim 7, whereinaxially offsetting the predetermined axis of rotation of the spindleeffects planar positional adjustment of the at least one substratesupport.
 9. The substrate transport of claim 1, wherein the drivesection comprises two motors configured to provide the substratetransport with six degrees of freedom.
 10. The substrate transport armof claim 1, wherein the drive section comprises two motors configured toprovide the substrate transport with seven degrees of freedom.
 11. Amethod of operating a substrate transport drive section comprising:magnetically supporting axial and radial moment loads applied to acoaxial spindle of the drive section substantially without contact;measuring a longitudinal orientation of the coaxial spindle about afirst predetermined axis of rotation of the coaxial spindle; andenergizing windings of the drive section to effect a substantially solidstate repositioning of the longitudinal orientation of the coaxialspindle about a second predetermined axis of rotation; whereinrepositioning of the coaxial spindle effects at least a spatialorientation of a substrate transport arm end effector connected to thecoaxial spindle with respect to a substrate support surface.
 12. Themethod of claim 11, wherein the first predetermined axis of rotation andthe second predetermined axis of rotation are at different longitudinalangles with respect to each other.
 13. The method of claim 11, whereinthe repositioning of the coaxial spindle effects a planar positionaladjustment of the end effector.
 14. The method of claim 11, wherein thefirst predetermined axis of rotation and the second predetermined axisof rotation are substantially longitudinally parallel with respect toeach other.
 15. A substrate transport for transporting substrates to andfrom at least one substrate seating surface, the substrate transportcomprising: a frame; a transport arm having at least one substratesupport coupled to the transport arm; a drive section located within theframe and having a coaxial spindle connected to the transport arm, thedrive section having no more than two motors configured to provide thesubstrate transport with six degrees of freedom and being configured tooperate the transport arm through a coaxial spindle rotation or coaxialspindle displacement, wherein each motor includes a stator.
 16. Thesubstrate transport of claim 15, wherein each stator is configured topassively magnetically levitate the coaxial spindle substantiallywithout contact, and to effect substantially solid state generation ofpropulsion forces in an axial direction for axially displacing thecoaxial spindle and to effect substantially solid state generation ofradial forces for displacing the coaxial spindle in a directionperpendicular to the axial direction.
 17. The substrate transport ofclaim 15, wherein an edge of each stator is axially offset from an edgeof a respective rotor coupled to the coaxial spindle, wherein the axialoffset is configured to provide passive levitation of the rotor.
 18. Thesubstrate transport of claim 15, wherein each stator is configured totilt the coaxial spindle.
 19. The substrate transport of claim 15,wherein each stator is atmospherically isolated from the coaxialspindle, the substrate transport further comprising non-invasive sensorsfor sensing a displacement of the coaxial spindle.
 20. The substratetransport of claim 19, wherein the non-invasive sensors include one ormore of an absolute sensor, a gap sensor and an incremental sensor. 21.A substrate transport for transporting substrates to and from at leastone substrate seating surface, the substrate transport comprising: asubstrate transport arm; a drive section located within a frame andconnected to the substrate transport arm through a coaxial spindle, thedrive section being configured to operate the substrate transport armthrough a spindle rotation or spindle displacement; and at least onesubstrate support coupled to the substrate transport arm; wherein thedrive section is configured to magnetically support the coaxial spindlesubstantially without contact and to effect a substantially solid statechange in an orientation of the coaxial spindle to spatially orient theat least one substrate support with respect to one of the at least onesubstrate seating surface, and wherein the drive section comprises atleast one stator attached to the frame and at least one rotor attachedto the coaxial spindle, the at least one stator being configured tochange at least an angular orientation of a predetermined axis ofrotation of the coaxial spindle with respect to a centerline of the atleast one stator through an interaction with the at least one rotor.